牛津仪器集团成员
Layerprobe分析样品表面和次表面层的成分和厚度。它是基于现有显微分析技术的一种无损分析的工具。与专用的薄膜测量工具相比，AZtec EDS微观分析系统中的Layerprobe速度更快、性价比更高、分辨率更高。
LayerProbe计算表面下各层的成分和厚度，完善了常规EDS分析中获得的元素和相信息。
This 8 page brochure shows the features, benefits and operating principles of LayerProbe - and the many applications it is applied to.
Here we present a new technique that enables measurement of the local thickness and composition of TEM lamellae and discuss its application to the failure analysis of devices.
Research and development of electronic circuitry mounted on plastic substrates is gathering pace.
Photovoltaic (PV) cells are an attractive option for generating carbon renewable energy but traditional designs often include undesirable toxic compounds and must be manufactured under special conditions.
LayerProbe是很多应用的理想技术，包括制备的前端和后端，研发，技术和工业镀膜，纳米电子器件等。
LayerProbe提供了全新的方式来原位量化TEM薄片厚度和质量。它能辅助FIB-SEM截面分析样品层状样品。
LayerProbe基于成熟的技术，与其他技术相比具有更为显著的优势。
LayerProbe和其他技术比较
| LayerProbe | Ellipsometry | FIB/TEM | RBS | |
| Non-destructive | Yes | Yes | No | Yes |
| High spatial resolution | Yes | No (>>1 micron) | Yes | Yes |
| Rapid analysis | Yes (each point takes seconds) | Yes | No (several hours) | No |
| Cost | Relatively inexpensive | Expensive | Very expensive | Extremely expensive |
LayerProbe 能有多精准?
比较硅衬底上的ALD层
| LayerProbe Thickness (nm) | Density (gcm-3) | Ellipsometry Thickness (nm) | Refractive Index | |
| HfO2 | 28.1 ± 0.1 | 9.4 | 33.6 ± 5 | 2.04 |
| Al2O3 | 57.0 ± 0.2 | 3.0 | 52.8 ± 5 | 1.64 |
LayerProbe EDS 和 RBSD 成分测量
| LayerProbe - Stoichiometric Ratio | RBS - Stoichiometric Ratio | |
| Hf /O | 2.13 | 2.07 |
| Al /O | 1.56 | 1.60 |
实例: PCB 应用——Si基体上的Ni和Au
LayerProbe和XRF厚度测量
| LayerProbe Thickness (nm) | Density (gcm-3) | XRF Thickness (nm) | |
| AU | 60.1 ± 0.7 | 19.3 | 61 ± 25 |
| Ni | 123.5 ± 0.7 | 8.9 | 141 ± 24 |
SEM截面测量确认结果...
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