产品
FIB-SEM
Nanomanipulators
OmniProbeOmniProbe Cryo软件
AZtec3DAZtecFeatureAZtec LayerProbeTEM
Hardware
EDSUltim MaxXploreImaging
软件
AZtecTEM
这是一款安装在FIB和SEM端口上的纳米操纵手,内置了一个100nm闭环反馈控制器,具有准确、灵活、易用等特点。使用闭环系统进行操作,完全独立于电镜样品台定位,从而为样品操作提供了额外的自由度。利用定制的样品台和探针组合(CSP)可将样品重新定位到特定角度。
同轴旋转分辨率可达0.1度,使样品在旋转期间一直处于相当于60um水平视场的放大倍率下成像。
使用下面比较表帮助您为应用选择最佳的OmniProbe并比较指标。
SPECIFICATION | OMNIPROBE | ||
Cryo | OmniProbe 350 | OmniProbe 400 | |
Linearity | 500 nm | 500 nm | 250 nm |
Encoder resolution | 100 nm | <50 nm | 10 nm |
Insertion repeatability | 5 μm | 5 μm | 2 μm |
Min velocity | 100 nm/s | 50 nm/s | 10 nm/s |
Max Velocity | 250 μm/s | 250 μm/s | 500 μm/s |
Compucentric rotation | ✘ | ✘ | ✔ |
APPLICATION | |||
Site specific lift-out | ✔ | ✔ | ✔ |
Plan-view | P | P | ✔ |
Vent free plan-view | ✘ | ✘ | ✔ |
Backside Thinning | ✘ | ✘ | P |
Atom Probe tomography sample preparation | P | P | ✔ |
Cryogenic liftout | ✔ | ✘ | ✘ |
Voltage contrast imaging | ✔* | ✔ | ✔ |
Charge neutralisation | ✔ | ✔ | ✔ |
On-Tip analysis | ✘ | ✘ | ✔ |
EBIC measurements | ✘ | O | O |
EBAC measurements | ✘ | O | O |
In Situ tip change | ✘ | O | ✔ |
P: 需要OmniPivot样品台 O: 选配项 * 当连接低温时不行
同轴旋转功能
自动化系统